| Summary: | 碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 99 === The purpose of this paper describes a six degree–of-freedom in the nano-precision measuring machine of the tracking control. The six degree-of-freedom nano-measuring machine consists of two parts, the first part includes five piezoelectric-actuators composed of four degrees-of-freedoms (Z, θx, θy, θz) compensation platform to compensate for assembly and processing errors. The second part contains V-type guide rail composed into the XY axis slide rail platform. The platform with the voice coil motor can achieve the positioning XY axis movement and tracking control. Because the voice coil motor through the control of its piezoelectric-actuators is not easy to achieve nanometer level,so with the use of piezoelectric actuators to compensate for the XY-axis moving platform slide caused by errors. It can improve the accuracy of platform motion.
The study features in the XY plane under biaxial. Optimizing fuzzy controller parameters by Taguchi quality engineering method, the PI-type fuzzy controller in this paper reduces tracking error of the moving platform. In addition, the corner path tracking control. The proposed use of slow design command can effectively improve the long-travel platform of the corner path overshoot method to achieve the required tracking control. Finally, the experiments show that the proposed method is an efficient tool for improving platform tracking ability. It could effectively reduce the error range and enhance the long-travel platform tracking motion.
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