| Summary: | 碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 99 === In this study, titanium dioxide thin films were deposited on Si substrate by radio frequency magnetron sputter system and the films were annealed at different temperatures. Titanium dioxide nanorods were synthesized for different lengths and densities on the pre-treated Si substrate by the hydrothermal method. The effects of sodium chloride concentrations and growth times on the characteristics of titanium dioxide nanorods were investigated. The luminescent characteristics, crystalline structure, surface morphology of films and nanorod arrays were examined by photoluminescence spectrometer, X-ray diffraction, and field-emission scanning electron microscope, respectively. The ultraviolet sensitivities of devices with different surface morphologies of titanium dioxide nanorods were studied. The titanium dioxide nanorods were the rutile phase. The average lengths of titanium dioxide nanorods increased with increasing concentrations of sodium chloride and growth times. The photoluminescence intensities decreased with increasing concentrations of sodium chloride. The optimum growth parameters of titanium dioxide nanorods synthesized to obtain the maximum ultraviolet sensitivity were: temperature was 100℃, the growth time was 7 hours, and the concentration of the sodium chloride was 2mol.
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