Microstructure and Characterization ofSputtered Ternary Ni-Ru-P Alloy Coatings

• Main Authors: Yu-Cheng Hsiao, 蕭又誠
• Other Authors: Fan-Bean Wu
• Format: Others
• Language: en_US
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/82863128421470179006

碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 99 === In the study, the ternary Ni-Ru-P alloy coatings are fabricated by magnetron dual-gun co-sputtering technique. The chemical composition variation of the coatings in terms of sputtering parameters, including input power, process temperatures and Ar gas flow rate are investigated. The Ni-Ru-P coatings with a Ru content <38.9 at.% remain an amorphous/nanocrystalline feature under a vacuum annealing temperature up to 500oC. On the other hand, Ni(Ru) and Ni-P precipitation phases form as annealing temperature is raised to 550oC. With Ru content >52.7 at.%, the as-fabricated Ni-Ru-P coating shows crystallized Ni + Ru + Ru2P mixed phases. Such phase distribution for high Ru-content ternary Ni-Ru-P is stable under annealing temperature up to 600oC. The crystallized Ni + Ru + Ru2P phases are also responsible for the slight increase in surface roughness. The hardness for low Ru contents as-deposited films distributed around 7.2 to 8.1 GPa. The coatings with crystallized Ru and Ru2P phases possess a higher hardness value of 10.4 GPa. Limited oxide penetration less than 20 nm at Ni29.5Ru64.6P5.9 coating surface is confirmed. The Ni + Ru + Ru2P phases distribution resulted from high content Ru co-sputtering is beneficial to oxidation resistance. The introduction of high Ru concentration significantly strengthens the mechanical and anti-oxidation behaviors of Ni-P-based coating. The Ru can improve the corrosion resistance of binary Ni-P coating from the electrochemical analysis. The effect of W, Al and Ru elements in Ni-P-based coating on their mechanical properties and characteristics are discussed.