Development of a Micro Photoluminescence Measurement System

• Main Authors: Mu-chiau Xie, 謝牧樵
• Other Authors: Fang-Jung Shiou
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/r95kde

碩士 === 國立臺灣科技大學 === 機械工程系 === 99 === A procedure is optical design and installation for Micro Photoluminescence measurement system, combined with CCD camera to video capture, for semiconductor-related researcher to facilitate the analysis of Fluorescence spectroscopy. Experimental system architecture includes a special mirror, central processing of a small hole Substitute of Beam splitter features, fluorescence measurements can be made immediately to receive images, observed the sample surface and take manual correction. The study also while doing Ordinary light Photoluminescence and Micro Photoluminescence of experiment and erection, compare the different structure of fluorescence spectroscopy experiments result, confirmed the system is effective. In addition, experiments confirmed that Micro Photoluminescence system to stimulate the strongest fluorescence, samples need focus the laser spot position, finally to complete a forward Micro Photoluminescence and imaging system develop is combined.