Analysis on Pad Performances and Planarization Effects for CMP
碩士 === 國立臺灣科技大學 === 機械工程系 === 99 === The properties and surface textures of the pads would strongly affect the CMP efficiency. Moreover, the grooving design on the pad is an important consideration in pad design. The good grooving design would have several advantages to the CMP process, such as enha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98246r |