Research of Blue Laser Focus Probe on Super Resolution Edge Detection

• Main Authors: Chia-Wei Chen, 陳家葦
• Other Authors: 范光照
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/17211004903907908801

碩士 === 國立臺灣大學 === 機械工程學研究所 === 99 === In this research, a high-precision blue laser focus probe system was developed. The system includes non-contact measurement probe and precision positioning stage. The measurement probe is based on the optical pick-up head of blu-ray player. Because the focus principle of optical-pickup head is astigmatic method, the linear region of the focus range could correspond the position of workpiece and OPU. The precision positioning stage is actuated by the ultrasonic motor and with laser diffraction grating interferometer and the 50x interpolator circuit. The accuracy of blue laser focus probe is 22 nm and the accuracy of precision positioning stage is 60 nm.