Design of Beam Stabilization System for Femtosecond Laser Micromachining

• Main Authors: Huai-Tzun Huang, 黃懷諄
• Other Authors: 楊宏智
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/67520790336476566489

碩士 === 國立臺灣大學 === 機械工程學研究所 === 99 === Recently the invention of the ultrafast laser makes the field of laser processing to a new legend. Femtosecond laser can machine the opaque material and also can machine the transparent material through the multi-photon absorption. This advantage could make the femtosecond laser process many materials. Femtosecond laser is the most perspective laser on research. Compared with the conventional nanosecond laser, femtosecond laser could result in the smaller heat affected zone, the burr is less and the accuracy is better. There are many factors that influence the laser processing in reality, for example, the temperature variation, vibration of the air conditioner and the air flow in the environment. All these factors would makes the laser beam unstable and affect the machining accuracy down. The research is to design and set an active stabilization system for correcting the unstable laser beam and eliminate the disturbance in the environment. The research uses two fast steering mirrors and two dimensional photodiode detectors to install stabilization system. The research use two detectors to test the ability of stabilization system to demonstrate that the system exactly can correct the disturbance in the environment and can stabilize the laser beam. Finally use the system in the silicon ablation, setting different energy of pulse and different pulses of ablation to discuss the result of the material processing.