Design and Fabrication of Micro Devices by Two-Photon Polymerization Technology

• Main Authors: Chang-Li Tseng, 曾長利
• Other Authors: 鍾添東
• Format: Others
• Language: en_US
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/42095613778969942704

碩士 === 國立臺灣大學 === 機械工程學研究所 === 99 === This paper studies the design and fabrication of micro products by Two-photon polymerization (TPP). First, a Computer-aided manufacturing (CAM) system with automatic slicing, path planning, laser & stage controlling functions is developed for manufacturing of micro products by TPP. Second, several fundamental characteristics of TPP manufacturing process, such as voxel sizes fabricated by different laser power and exposure time, minimum gap between two lines, product shrinkage after fabrication, and minimum clearance between two movable parts are studied to make current CAM system more reliable and more accurate. Several manufacturing parameters are also obtained for fabrication of different types of micro products. For reducing fabrication time and keeping structure stiffness, a stiffened ribs design method is proposed for adding stiffeners in hollow product to strengthen the micro structure. Finally, several micro products, such as string characters, micro gratings, micro lens arrays, micro pillar arrays, NTU Fu bells, and micro valves are fabricated to verify the correctness and effectiveness of the integrated CAD/CAM system.