A Micromirror Module using a MEMS Digital-to-Analog Converter and its Application for White-Light Interferometry System
博士 === 國立臺灣大學 === 機械工程學研究所 === 99 === In this work, we develop a microelectromechanical digital-to-analog converter mirror module (M-DACMM), and demonstrate its application for non-contact optical surface profiling systems. The proposed device generates nano-scale step motions that are proportional...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67992207090398620449 |