The design and fabrication of deformable mirror
碩士 === 國立臺灣大學 === 光電工程學研究所 === 99 === We compare the conventional and improved processes of deformable mirror(DM). The main difference between the conventional process and the new process is changing the order of the conventional process in order to etch silicon by ICP without any metal and putting...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/04778281721638560558 |