The design and fabrication of deformable mirror
碩士 === 國立臺灣大學 === 光電工程學研究所 === 99 === We compare the conventional and improved processes of deformable mirror(DM). The main difference between the conventional process and the new process is changing the order of the conventional process in order to etch silicon by ICP without any metal and putting...
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04778281721638560558 |
| Summary: | 碩士 === 國立臺灣大學 === 光電工程學研究所 === 99 === We compare the conventional and improved processes of deformable mirror(DM). The main difference between the conventional process and the new process is changing the order of the conventional process in order to etch silicon by ICP without any metal and putting a spacer between the top membrane and the bottom electrode to precisely control the gap between two electrodes which can ensure the accuracy of simulation of the relation between applied voltage and the displacement of the center of deformable mirror.
The auto-focus(AF) optical system and zoom system which consist of deformable mirrors are the optical system without any moving elements that can fold the optical path to reduce the thickness of DM. We design the parameters of the major axis and minor axis of ellipse on the back side of the top membrane to address the need of AF optical designed by Wei-Ling Chang. Then we use ANSYS to simulate the design of DM which was used in AF system. We verify the simulation result by experiment. In the end of this part, we simulate the free form deformable mirror which can improve the preference of optical properties of auto focus system.
Zoom system consisting of DM with bifocal type is introduced. The DM in zoom system needs negative optical power and large central displacement of DM. Changing the material to transparent can solve the problem of negative optical power. We use ITO as a conductive layer on glass and other parts are the same as conventional DM. The problem with large displacement we try to change is the material from PI-2610 to PDMS which has lower young’s module and Poisson ratio and simulate the displacement to compare it with the displacement of DM made by PI-2610 under the same power supplied. The displacement will increase by about 95% after changing the material of flexible layer. Then we design a process to produce the DM made by PDMS. To complete the DM and compare it with a the result of simulation is our future work.
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