Investigation of ZnO Hydrogen Sensors

• Main Authors: Meng-Kai Chou, 周孟楷
• Other Authors: Shih-Wei Tan
• Format: Others
• Language: en_US
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/73711227298693443572

碩士 === 國立臺灣海洋大學 === 電機工程學系 === 99 === In this thesis, a ZnO based metal-semiconductor-metal hydrogen sensors is fabricated and studied. nanocrystalline zinc oxide transparent conducting films are prepared via sol-gel routes and spin coating technique, using zinc acetate as precursors. Pt is employed as sensing metal due to its excellent catalytic activity towards hydrogen gases. In our experiment, the hydrogen sensors will put on home made variable temperature stainless steel chamber, under the fixed flow (500 ml/min) of several kinds of different concentrations H2 in N2 gas will be use. The sensing responses, static sensing variations, and transient responses of this sensors measured under different hydrogen concentrations have also been presented.