Fabrication and Characterization of Suspended Microbridge Oxide Infrared Detector
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 99 === This paper is intended to present the design of an infrared thermal radiation sensor (Bolometer) capable of absorbing low- intensity infrared radiation. A Fabry-Perot optical resonant cavity structure is suspended over a silicon substrate to prevent the absorb...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15886539594777758372 |