Evaluation of stress gradient in nitride thin films by combining cos2αsin2ψ X-ray diffraction and laser curvature methods
碩士 === 國立清華大學 === 工程與系統科學系 === 99
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/46717682209106304908 |