Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials

Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials

碩士 === 國立清華大學 === 工程與系統科學系 === 99

Bibliographic Details
Main Authors:	Lee, Po-Hsiang, 李博祥
Other Authors:	Liang, Jenq-Horng
Format:	Others
Language:	zh-TW
Published:	2011
Online Access:	http://ndltd.ncl.edu.tw/handle/35210488695150101578

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