Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials

碩士 === 國立清華大學 === 工程與系統科學系 === 99

Bibliographic Details
Main Authors: Lee, Po-Hsiang, 李博祥
Other Authors: Liang, Jenq-Horng
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/35210488695150101578
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spelling ndltd-TW-099NTHU55930532015-10-13T20:23:00Z http://ndltd.ncl.edu.tw/handle/35210488695150101578 Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials 矽離子佈植技術對於製作相變化記憶體材料之應用研究 Lee, Po-Hsiang 李博祥 碩士 國立清華大學 工程與系統科學系 99 Liang, Jenq-Horng Chin, Tsung-Shune 梁正宏 金重勳 2011 學位論文 ; thesis 95 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 99
author2 Liang, Jenq-Horng
author_facet Liang, Jenq-Horng
Lee, Po-Hsiang
李博祥
author Lee, Po-Hsiang
李博祥
spellingShingle Lee, Po-Hsiang
李博祥
Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials
author_sort Lee, Po-Hsiang
title Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials
title_short Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials
title_full Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials
title_fullStr Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials
title_full_unstemmed Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials
title_sort applications of using silicon ion implantation techniques in fabricating phase change memory materials
publishDate 2011
url http://ndltd.ncl.edu.tw/handle/35210488695150101578
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