Summary: | 博士 === 國立清華大學 === 電子工程研究所 === 99 === Biochip technology and array detection are major breakthroughs in biotechnology development. The parallel processing in multiple types of samples in an array can not only improve the detection efficiency and significantly short the detection time, but also reduce the requested sample quantities, which let the less bio-samples are needed and used to do more tests. Therefore, the biochips, such as Affymetrix chip and Nanogen chip series, have a variety of applications in wide ranges, and also have become technical standards in medical examinations and immunoassays. However, the assays using biochips still need cumbersome manual procedures to deal with the samples before applied on the testing onto the biochip. The instruments to read out the information on biochips are always huge, expensive and difficult to move. In order to satisfy the requests in shorter reaction time and lower cost, the new biochip is designed as an automatic laboratory chip with more developed functions by integrating semiconductor fabrication, micro-electric- mechanical system (MEMS), and microfluid system technology.
Low-temperature polycrystalline silicon (LTPS) technology has been developed and used in small-scale panels with high frame-rate and high resolution performances. The LTPS devices get higher electron mobility, lower threshold voltage, and better transistor performances than the devices on the amorphous silicon. But the device leakage and variations in LTPS process are still required to be improved. The thesis proposes a concept of the integration system biochip fabricated by standard LTPS process, and designing a high-sensitivity detector circuit overcoming the leakage issue of LTPS devices in pixels. The biosamples binding on magnetic beads sorted and transported by varying electromagnetic fields, which come from current-controlled microcoil array. Integration chip is built up by CMOS process due to the serious process variations in LTPS. The prototype carries out the concept of integration chip in sorting, sampling, transporting by microcoils and in real-time monitoring by detectors. It is also proved in the application of chemiluminescence in bio-test reactions with HRP labels.
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