The Study of A High Scalable Interface Fuse (iFuse) for Advance CMOS Logic Technology

碩士 === 國立清華大學 === 電子工程研究所 === 99 === In this paper, we proposed a novel interface Fuse (iFuse) for low power electrically programmable fuses in advanced CMOS applications. With an offset-landed metal to contact or contact to poly-silicon structures, the iFuse can be programmed by substantially reduc...

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Bibliographic Details
Main Authors: Yang, Li-Yu, 楊立宇
Other Authors: Lin, Chrong-Jung
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/90650816316448213689
Description
Summary:碩士 === 國立清華大學 === 電子工程研究所 === 99 === In this paper, we proposed a novel interface Fuse (iFuse) for low power electrically programmable fuses in advanced CMOS applications. With an offset-landed metal to contact or contact to poly-silicon structures, the iFuse can be programmed by substantially reduced current as compared to conventional fuses. A diagonal contact layout and the optical pattern correction scheme can further improve the cell stability as well as its programming characteristics.