Design of High-performance CMOS MEMS Accelerometer SoC's
博士 === 國立清華大學 === 電子工程研究所 === 99 === This thesis proposes a design concept to achieve high-sensitivity, low-noise, and thermally stable CMOS MEMS capacitive accelerometers. A novel process was demonstrated with a capacitive accelerometer, which contains a thermally stable MEMS sensor and an on-chip...
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61367606307474051754 |