| Summary: | 碩士 === 國立清華大學 === 電子工程研究所 === 99 === In the 21st century, researchers have endeavored to explore the mystery of human brain. Human brain has specific neural networks to accomplish complex behaviors, such as instinct, memories, learning, and emotions, etc. Therefore, neuroscience has become one of the most popular research fields. The neural signals need to be analyzed in detail to help to rehabilitate the disabled patients. The study of neuroscience facilitates the human prosthesis, artificial intelligence and electronic industry. The MicroElectrode Array (MEA) provides a non-invasive and non-toxic platform for long-term monitoring of neuron activities.
This thesis proposes a single semiconductor chip consisted of CMOS-compatible sensors and recording amplifiers monolithically. The MEA chip can alleviate the wire-routing limitation by integrating the multi-channel amplifiers into the same chip. The system is fully compatible with current VLSI technology. Moreover, it is bio-compatible and non-toxic for long-term measurement. By the die-level micromachining fabrication, the well-known MOSFET has been developed as sensors and a hole structure above the sensor has been realized to approach enhancing cell adhesion to the sensor. The thesis describes the design procedure, the post-micromaching process and electrical tests. Eventually, the MEA chip demonstrates several biological tests and is proved capable of monitoring of the electrocardiogram from isolated zebrafish heart and cardiomyocytes.
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