Development of a Novel Dual-axis Large-displacement Microstage Using Lorentz Force Actuators and Curved-beam Springs
碩士 === 國立清華大學 === 動力機械工程學系 === 99 === This thesis demonstrates the design, fabrication and characteristics of a novel 2-axis microstage. The stage is supported by curved-beam spring and driven by two Lorentz force actuators. By modulating the magnitude and direction of the linear actuators, the stag...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44144174842693915685 |