| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 99 === Human’s brain is found of millions of neural cell, these cells transmit electric signal in order to communication with each other. In order to realize the function of neural signal, scientist implant electrode to record the neural signal. There are kinds of microprobe for improving the performance of neural signal recording such as microwire probe silicon based probe, and polymer based probes. Polymer based probes show better performance in long term neural signal recording because of its soft structure and high biocompatibility. In the past we reported an electrostatic actuation process to fold the planar probes to be the arbitrary orientations of three-dimensional probes for neuroscience application. Now we developed a novel MEA with 2 × 2, 4 × 4 and 6 × 6 electrodes packaging by microchannel flow. By using Parylene C, SU-8 and gold as the materiel, we use E-beam evaporation, polymer deposit system (PDS), lithography fabrication, reacting ion etching (RIE) and anodic metal dissolution method to fabricate the microelectrode array. After the fabrication finished, we folded the chip step by step and alignment it by using an alignment column. Fixing each layer by adding PDMS liquid into the microchannel and heating for an hour to solid the flow. After complete the packaging of probes chip, the connection between chip and PCB should be found. In this part we used anisotropic conductive film (ACF) to build the connection. There are solder coating on the bonding pad of the PCB so that it could be heat and melt to fill the gap between the chip and bonding pad. After finished the package, an implant test for the designed probe should be precede. The result indicates that the designed probes have satisfied the request for our implant purpose. The designed MEA implanted into a bio-gel successfully for the implant test. For the impedance measurement, MEA shows 125 kΩ at 1 kHz, phase -60°. A 600 μV potential change was obtained in electrocardiography measurement of zebrafish.
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