Development of 3D CNTs-Polymer Composite for Flexible Capacitive Sensors
碩士 === 國立清華大學 === 動力機械工程學系 === 99 === This study reports a novel approach to implement 3D carbon nanotubes (CNTs) interdigitated finger electrodes on flexible polymer, and the detection of strain, bending curvature, tactile force, and proximity distance are demonstrated. The merits of presented desi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65537995137717648640 |
| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 99 === This study reports a novel approach to implement 3D carbon nanotubes (CNTs) interdigitated finger electrodes on flexible polymer, and the detection of strain, bending curvature, tactile force, and proximity distance are demonstrated. The merits of presented design are as follows, (1) employing the aligned CNTs (~70?慆 in height) as interdigitated finger electrodes to increase sensing area and initial capacitance; (2) 3D interdigitated finger electrodes and anchor structures are naturally formed by the use of anisotropically-etched silicon mold; (3) the 3D CNTs electrodes and electrical routings are batch-fabricated on the silicon substrate, and are transferred to the flexible polymer substrate by polymer molding; (4) the CNTs-polymer composites as sensing electrodes and electrical routing are more robust and can avoid the problem of delamination; (5) the integration of 3D polymer structure can be further adopted as flexible sensors with multi-functional sensing. Preliminary fabrication results demonstrate a flexible capacitive sensor with 50?n?慆 high CNTs interdigitated electrodes on poly-dimethylsiloxane (PDMS) substrate. The tests show that its typical capacitance change is several dozens of fF and the gauge factor ranges 4.6~6.5 for strain and bending curvature measurement; the sensitivity of tactile force is 1.11%/N; the proximity distance can be detected up to 1500?慆 away from the sensor.
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