Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology
碩士 === 國立清華大學 === 動力機械工程學系 === 99
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81174493576901612882 |