Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology
碩士 === 國立清華大學 === 動力機械工程學系 === 99
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81174493576901612882 |
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ndltd-TW-099NTHU5311184 |
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ndltd-TW-099NTHU53111842015-10-13T20:23:01Z http://ndltd.ncl.edu.tw/handle/81174493576901612882 Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology 以製程模擬分析法評估電容式微機電麥克風薄膜之殘餘應力 Wang, Han-Jung 王涵融 碩士 國立清華大學 動力機械工程學系 99 Chiang, Kuo-Ning 江國寧 2011 學位論文 ; thesis 91 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 動力機械工程學系 === 99 |
| author2 |
Chiang, Kuo-Ning |
| author_facet |
Chiang, Kuo-Ning Wang, Han-Jung 王涵融 |
| author |
Wang, Han-Jung 王涵融 |
| spellingShingle |
Wang, Han-Jung 王涵融 Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology |
| author_sort |
Wang, Han-Jung |
| title |
Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology |
| title_short |
Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology |
| title_full |
Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology |
| title_fullStr |
Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology |
| title_full_unstemmed |
Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology |
| title_sort |
thin film residual stress assessment of capacitive mems microphones using process modeling technology |
| publishDate |
2011 |
| url |
http://ndltd.ncl.edu.tw/handle/81174493576901612882 |
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