TRIZ-based problem solving for process-machine improvement：Slit-valve innovative redesign
碩士 === 國立清華大學 === 工業工程與工程管理學系碩士在職專班 === 99 === This paper proposed a TRIZ-based integrated problem solving process to resolve a process-machine problem by re-designing the slit-valve of the processing machine. Based on a slit-valve failure of a chemical vapor deposition equipment in one of major Tai...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/85541873213520198998 |