Design and Fabrication of Suspending Micro-thermoelectric Generator with Transmissivity and Parallel Array Structure

• Main Authors: Ling-Yu Ma, 馬翎瑜
• Other Authors: I-Yu Huang
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/21124776473798456339

碩士 === 國立中山大學 === 電機工程學系研究所 === 99 === This thesis aimed to design and develop a novel micro-thermal electric generator (μ-TEG) with a transparent parallel-array bridge microstructure using the ANSYS finite element analysis software and Micro Electro Mechanical Systems (MEMS) technology. The presented μ-TEG can convert the temperature difference between the indoor and outdoor planes of building glass window into a useful electrical power. The thermoelectrically transferred output electrical power is suitable for recharging various mobile communication products. Conventional μ-TEG presented a high fabrication cost, low integration compatibility with IC processes and non-transparent characteristics. To improve these disadvantages, this research utilizes a batch production surface micromachining technology to implement the Poly-Si based parallel-array μ-TEG on a transparent quartz glass substrate and the main fabrication processes adopted in this research are including six thin-film deposition processes and five photolithography processes. The implemented Poly-Si based transparent μ-TEG has successfully demonstrates a maximum temperature difference of 1.38℃ between the hot plane (substrate) and cold plane (suspending microstructure), a maximum output voltage of 13.28 mV/cm2, a maximum output power of 110.22 nW/cm2 and a maximum light transmission of 40%.