Study of Surface Property of Rubbed Polyimide Thin Films using Reflection Anisotropy Spectroscopy
碩士 === 國立中山大學 === 光電工程學系研究所 === 99 === Reflectance anisotropy spectroscopy is a non-contact technique for surface detection. which means through the optical reflection from surface of the substrate measured. Because of its high sensitivity, RAS is used for in real-time control of semiconductor epita...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88227542923919927214 |