Study of Feature Dimensions of SU-8 High-aspect-ratio Microstructures

Study of Feature Dimensions of SU-8 High-aspect-ratio Microstructures

碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 99 === The present study aims to produce high-aspect-ratio SU-8 micro-gear structures in the lithography process of MEMS UV-LIGA technology, and also to study the effect of the UV-light diffraction on the sidewall inclination. Different thin-film materials with...

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Bibliographic Details
Main Authors:	Li-Chung Hsieh, 謝立中
Other Authors:	none
Format:	Others
Language:	zh-TW
Published:	2011
Online Access:	http://ndltd.ncl.edu.tw/handle/34732553029859728587

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