Research of F-doped ZnO thin films deposited by pulse DC magnetron sputtering of zinc target
碩士 === 國立中央大學 === 光電科學研究所 === 99 === A new transparent conducting oxide (TCO), Fluorine-doped ZnO (FZO) film has been deposited on the glass substrate using pulse DC magnetron sputtering with zinc target as well as Ar, H2, O2 and CF4 containing gas mixtures at room temperature. In the zinc oxide (Z...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73043889067545578662 |