Study on Micro-Machining of Quartz by Using Electrochemical Discharge Machining
博士 === 國立中央大學 === 機械工程研究所 === 99 === Quartz is the critical material used in MEMS due to its beneficial properties, such as piezo-electric effect and stable chemical properties. However, it is difficult to machine between the efficiency and accuracy using conventional methods. Electrochemical discha...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77442819014742331487 |