Investigation of Boron Transient Diffusion in Sub-micron Patterned Silicon by Scanning Capacitance Microscopy
碩士 === 國立中央大學 === 物理研究所 === 99 === Current microelectronics chip can be composed of thousands of microarrays that contain up to millions of physically identical transistors layout in vastly different micro-environment. Systematic threshold voltage (Vth) variation due to the detailed difference in th...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07900423829794430110 |