Fabrication of the nickel silicide and silicon nanostructure array and their properties

碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 99 === This study is divided into two parts. The first part mainly focuses on the on the synthesis and characterization of well-ordered arrays of size-controlled, vertically-aligned 1D Si nanostructure on the (001)Si substrates and their properties, and the other p...

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Bibliographic Details
Main Authors: Dong-han Lin, 林東翰
Other Authors: Shao-liang Cheng
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/40377647681230067435