| Summary: | 碩士 === 國立中央大學 === 工業管理研究所碩士在職專班 === 99 === As the advanced technology development of Integrated Circuit (IC) and in order to increase the circuit efficiency, the circuit channels become shorter and the floodgate extremely oxide layers become thinner which results in the tolerance of electrostatic discharge (ESD) for electronic components become lower. As for the manufacturing environment of electrostatic and sensitive components, the requirement will be more careful. The process of manufacturing, fabrication, test and transportation for electronic products which will be because of the incomplete grounding system, miss operation or no proper prevention action for static charge to result in the ESD, product circuit damage or low reliability. The ESD control program except grounding system and material choice, the ionizer can neutralize the static charge on insulated objects.
The operating parameter of ionizer includes power output, pulse time, overlap and balance. The charged plate monitor (CPM) is used to measure the positive discharge time, negative discharge time, high peak offset voltage and low peak offset voltage. In this research, the factorial design, central composite design, response surface methodology and desirability function were used to investigate the most significant factor (Balance) and optimum operating parameter (Power Output =70%、Pulse Time=0.955、Overlap=21.72%、Balance=53.1). Based on the statistical analysis and conditionality, the results have provided much valuable information on the setting method.
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