Study of the High Boiling Point Air Pollutants from Process Exhaust of High-tech Industries

• Main Authors: Chang, Jui-chi, 張瑞琪
• Other Authors: Bai, Hsun-ling
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/27739977372403039465

碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 99 === As the yields of semiconductor and TFT - LCD panel production technology industries continuously increase, the environmental consciousness is also raising. The Environmental Protection Agency (EPA) of Taiwan therefore tightens the air pollution control and emission regulations. Properly evaluating the removal efficiencies of treatment units from process exhausts have become a very important issue both for the industrial plants and the EPA. In this research, sampling and analysis for the high boiling point compounds were developed. They can provide representative efficiency evaluation of the treatment units for removing the high boiling point compounds which often exist in the thinners and strippers. The high boiling point air pollutants being investigated were ethanolamine (MEA), dimethyl sulfoxide (DMSO), diethylene glycol butyl ether (BDG), tetramethylammonium hydroxide (TMAH), propylene glycol methyl ether (PGME), propylene glycol methyl ether acetate (PGMEA), 1-Methyl -2-pyrrolidinone (NMP), cyclo-hexanone (CHN) and tetra-methyl-ammonium hydroxide (TMAH). The process exhaust was sampled with impingers, then analyzed using either gas chromatographer/flame ionization detector or ion chromatographer. The detection limits in this study for organic compounds were 0.027~0.263 mg/L, and for the inorganic compounds they were less than 0.001~0.073 μg/L. The precision range was less than 0.1~2.9 %, the accuracy range was from 85.0 ~ 113.3 %.