DEVELOPMENT OF NANO PROBING AND PASSIVE VOLTAGE CONTRAST TECHNIQUES FOR THE FAILURE ANALYSIS OF MOSFET
碩士 === 國立交通大學 === 理學院碩士在職專班應用科技學程 === 99 === This study pays more attention to understand the reason of defect deterioration on device performance. The state-of-the-art nano probing and passive voltage contrast techniques are established for the failure analysis of MOSFET. We successfully address so...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03850448298449752390 |