Numerical Investigation of VUV Emission from a Homogeneous Coaxial Xenon Excimer Discharge Driven by Distorted Bipolar Square Voltages
博士 === 國立交通大學 === 機械工程學系 === 99 === Recently, the excimer UV (EUV) lamp has found a wide range of applications in industry, for example, in ozone generation and surface cleaning for Si wafer in semiconductor fabrication process. The generation of EUV results from the reaction mechanism like ionizati...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03758309759368730714 |