| Summary: | 碩士 === 國立交通大學 === 管理學院管理科學學程 === 99 === Clean room environment control items include temperature, humidity, particle, vacuum pressure, pure-water conductivity and so on. For more aggressive and stable environment control, the operation specs should be tightened and reasonable rules are necessary to review system stability.
The basic environment operation quality control should meet control limit values. The reasonable set points for high and low control depend on the operation data type. With normal distribution operation data type we can use the SPC rule to set up the high and low limit values. With non-normal distribution operation data type we develop new sigma parameters to set up the high and low limit values.
Concerning the operation stability, for the normal distribution operation data type we can use the Cpk rule to examine the stability. For the non-normal distribution operation data, we derive the new sigma ratio to meet the environment operation stable review requirement.
Regarding the target control management, the median shift review rule can be used to check the system operation items including miss operation and system operation capacity.
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