Fabrication and simulation of Guided-Mode Resonance Filter

• Main Authors: Chou, Bo-Yang, 周柏仰
• Other Authors: Lin, Sheng-Di
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/24000986111879503960

碩士 === 國立交通大學 === 電子研究所 === 99 === In this thesis, the optical filters based on guided-mode-resonance (GMR) effect are studied theoretically and experimentally. These filters are constructed with combined diffraction gratings and waveguide structures. A design rule based on grating diffraction, effective medium method, and waveguide theory is fully discussed. To fabricate the GMR filter, we use GaAs-based materials for their potential in the integration with other optical devices on the GaAs substrate. The device processing includes nano-holes formed by e-beam lithography and dry etch methods. To make the grating membrane surrounding by air, a wet-etch of AlGaAs sacrificing layer completes the fabrication. We demonstrate two 2-D GMR filter successfully. One has a resonance peak at 1051nm with ~86% reflectivity and 356nm bandwidth and, for the other one, the resonance peak of 926nm with ~91% reflectivity and 126nm bandwidth is obtained. We also show that the reflection peaks and bandwidths are variable by tuning the grating periods and fill factors. Finally, a short discussion on the comparison between experimental data and simulation results is presented.