Fabrication and optical characteristics of 1-D TiO2 nanostructure arrays by atomic layer deposition and anodic aluminum oxide
博士 === 國立交通大學 === 材料科學與工程學系 === 99 === Vertically aligned TiO2 nanotubes and TiO2 thin film are fabricated on p-type Si substrates by using atomic layer deposition system with anodic aluminum oxide template at 400 ?aC. The wall-thickness of TiO2 nanotubes and the thickness of TiO2 thin films can be...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37775855446178733409 |