A decision model for photo resist nozzle allocation

• Main Author: 溫紫菱
• Other Authors: 許錫美
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/42520259286793170167

碩士 === 國立交通大學 === 工業工程與管理學系 === 99 === This study addresses the photoresist nozzle allocation problem. Given the product demands of a planning period, and the photoresist nozzle allocation of the previous period, considered the machine related constraints and the relationship among the types of photo resist , we formulate an integer programming model for minimizing the total cost to determine the optimal photoresist nozzle allocation. The items in the total cost function are dummy cost of photoresist nozzle, OK82 cost, and purge cost. Then we use LINGO to solve the IP model. The computational timeis exponential growth with the numbers of photo resist and machine. .For reducing the computational time we propose a heuristic method with reducing the searching space to solve the IP model. We also verify the accuracy of the proposed heuristic method. Approximate 98.6% examples the optimal solution can be found. In 1.4% examples the deviations of total cost from those in the optimal solution are not over 4%. Finally a near real case example is given to illustrate the application of the IP model.