| Summary: | 碩士 === 國立暨南國際大學 === 電機工程學系 === 99 === In the thesis, the membrane characteristics including leakage current, membrane structure and electrical interference for biomedical testing of a mixture of 3-aminopropyltriethoxysilane (γ-APTES) and polydimethylsiloxane (PDMS)-treated hydrophobic fumed silica nanoparticles (NPs) fabricated by using semiconductor processing technique were investigated. The effects of UV irradiation on the membrane characteristics were also studied. The sensing membranes were prepared either by spin-coating or capillary atomic force microscopy (C-AFM) tip-coating method. The leakage characteristics and electrical interference properties of the polysilicon wire biomedical sensors with the two sensing membranes, γ-APTES and -APTES+NPs, prepared by C-AFM tip coating were compared.
Our results show that adding the PDMS-treated hydrophobic fumed silica nanoparticles into γ-APTES can effectively reduce leakage currents of the membranes prepared by both the spin-coating and C-AFM tip-coating methods. After UV irradiation, both the -APTES and -APTES+NPs membranes were found to reorganize, forming large grain clusters and enhancing leakage current along the grain boundares. However, the C-AFM tip-coated membrane does not exhibit nanoparticles aggregation after UV irradiation. We believe that UV irradiation can provide more hydroxyl group and increase membrane integrality of -APTES. Therefore, leakage current of the membrane can be reduced, thus increasing the electrical interference rejection when multiple sensors were operated simultaneously.
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