The Study of Tuning Work Function with Multi-Layer Metal Stacks for Deep Nano High-K/Metal Gate CMOSFET Applications

碩士 === 國立成功大學 === 電機工程學系專班 === 99

Bibliographic Details
Main Authors: Che-HuaHsu, 許哲華
Other Authors: Yean-Kuen Fang
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/29910206696182861198