Energy-Saving Strategy and Efficiency Analysis for The Primary/Secondary Variable Volume Chiller System in TFT-LCD Fab.

• Main Authors: HSIEH, Chia-En, 謝嘉恩
• Other Authors: HSIEH, Wen-Chien
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/44465565567417187198

碩士 === 國立勤益科技大學 === 冷凍空調系 === 99 === The cleanroom areas used in the TFT-LCD manufacturing grows with the increasing size of the TFT-LCD with larger and larger production line. The cooling load in the cleanroom also increases with the growing manufacturing area, and need more and more DC and MAU etc. air conditioning equipment. The energy consumption used in the facilities also raises with the increasing equipments. In the energy used in the air conditioning system, the chiller usually spend 60%, the pump spend about 20% of the total system energy. If the chiller pumps have not operated properly, the energy consumptions of pump and chiller will also be increased. The variable volume system becomes popular due to the demand of carbon emission reduction and energy conservation. The control of chiller pump speed was usually ignored in the practice and affects the chiller system performance. The Primary/secondary variable volume chiller system used in the TFT-LCD cleanroom was tested and studied. The chiller performance was tested in the partial load, and chiller plant optimal control was investigated to increase the system efficiency. The chiller pump speed and staging control was investigated in detail, and a simple control algorithm was build to control the chiller pump optimally. This control algorithm was tested and verified in practice to reduce the pump energy consumption effectively.