Study on the Characteristics Improvement of GAA MNCs Poly-Si TFTs with Vacuum Cavity and LDD Structures
碩士 === 國立中興大學 === 電機工程學系所 === 99 === In this thesis, we utilize sidewall spacer technique to form multiple nanowire channels (MNCs) without any advanced lithography equipment. Furthermore, suspending multiple nanowire channels are formed by wet etching sacrificial SiO2 to establish the gate-all-arou...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9c8348 |