The fabrication of nano-hemisphere array mold and its application on nanobio sensor

• Main Authors: Yu-Shan Chen, 陳毓姍
• Other Authors: Gou-Jen Wang
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/19419283849313764803

碩士 === 國立中興大學 === 機械工程學系所 === 99 === In replica molding or imprinting, robustness and durability of the replica mold are the main requirements for industrial applications. In this study, we demonstrate a replica mold fabrication method for nano-hemisphere arrays nanomolding by nickel electroforming using the highly ordered nano-hemisphere array of the barrier-layer surface of an anodic aluminum oxide (AAO) membrane as the master mold. The diameter and height of the hemispheric nanostructure are 80 nm and 47 nm, respectively. The feature size of the nano-hemispheres can be further reduced by the use of a sulfuric acid etched AAO master mold. Using the Ni replica mold, nano-hemisphere arrays of polycarbonate (PC) were obtained by hot embossing, and nano-patterned poly(lactic-co-glycolic acid) (PLGA) tissue engineering scaffolds were fabricated by casting. Those results indicate that the proposed nanomolding method is suitable for further industrial applications. The fabricated 3D nickel mold is further used for replica molding of a nano-structure polycarbonate (PC) substrate by hot embossing. An Au thin film is than sputtered on the PC substrate to form the electrode followed by the deposition of an orderly and uniform gold nanoparticle (GNP) layer on the 3D Au electrode using electrochemical deposition. Finally, silver nanoparticles (SNP) are deposited on the uniformly deposited GNPs to enhance the conductivity of the sensor. Electrochemical impedance spectroscopy (EIS) analysis is then used to detect the concentration of the target element. The sensitivity of the proposed scheme on the detection of the dust mite antigen Der p2 can reach 0.1pg/ml.