Study of properties of ZnO:Ga thin films prepared by RF magnetron sputtering for amorphous silicon thin film solar cell applications
碩士 === 中興大學 === 光電工程研究所 === 99 === In this study, Gallium-doped zinc oxide (GZO) thin films were deposited on glass by RF magnetron sputtering. We investigated the effects of deposition parameters such as sputtering power, substrate temperature, working pressure and film thickness on properties of G...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33109011182246837472 |