Study on the deposition process parameters of In2S3 films by the Taguchi method
碩士 === 龍華科技大學 === 工程技術研究所 === 99 === In the study, we examine the optimization of the process parameters of In2S3 films deposited on inexpensive soda-lime glass substrates by rf magnetron sputtering. The Taguchi method with a L9 orthogonal array, signal-to-noise (S/N) ratio and analysis of variance...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14666931191963565543 |