Fabrication of the bondable long period fiber grating strain sensor based on thick photoresist stacking technique
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 99 === In this thesis, the bondable long period fiber grating is fabricated by thick photoresist stacking technique and etching process in MEMS. This includes two types as following: Based-sandwich long period fiber grating (B-SLPFG) and Packaged-sandwich long pe...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
|
Online Access: | http://ndltd.ncl.edu.tw/handle/07720255831962625222 |