Study on the Properties of (100) Oriented ZnO Thin Film and Application of Bulk Acoustic Wave Resonator
碩士 === 國立高雄應用科技大學 === 電子工程系 === 99 === In this study , we deposited (100)-oriented ZnO film by reactive RF magnetron sputtering method , and apply ZnO film to fabricate thin film bulk acoustic resonator (FBAR). The structure of FBAR were prepared by DC sputtering , reactive RF magnetron sputtering...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43764006640442763805 |